According To this combination of hardness, resistance to dress in, heat and corrosion, SiC is usually specified for seal faces and large overall performance pump sections. CMP of single-crystal SiC was initially claimed by Zhou [22] in 1997. He observed that chemical reactions of CMP could possibly be enhanced by https://www.quora.com/profile/Trevor-Flatcher-2/Innovative-Applications-of-Silicon-Carbide-in-Sensor-Technology-Silicon-carbide-SiC-a-versatile-semiconductor-materi